School of Engineering Department of Electronic and Computer Engineering 146 Nano/microfabrication Technologies for Microelectronic Supervisor: YANG, Yansong / ECE Student: CHEN, Hongyu / ELEC YAN, Zhichen / CPEG Course: UROP1100, Spring UROP1100, Spring This report introduced what Zhichen YAN and Hongyu CHEN have learned and gained in Professor Yansong YANG's group in the spring semester of 2023. There are 5 parts to this report: 1. NFF lab tour 2. Joint seminar given by several distinguished professors 3. Chemistry safety and nanosafety 4. Contamination control and protocol 5. The process flow for a 2cm*2cm donor LiNbO3 wafer with SiO2 in between Parts 1-3 were completed by Zhichen YAN, and parts 4-5 were completed by Hongyu CHEN. Nano/microfabrication Technologies for Microelectronic Supervisor: YANG, Yansong / ECE Student: YEUNG, Chun Ting / ELEC Course: UROP1000, Summer The objective in this stage of the project is to understand key processes in microfabrication, where TEM (Transmission Electron Microscopy) and FIB (Focused Ion Beam) are chosen as topics. TEM is a critical technology and technique to modern research, especially in material science and nanotechnologies that require the study of the structure of atomic arrangements or even the individual atom itself. It is important to understand the underlying working principle of the equipment and how to use it properly to assist with research in the related field. In this report, a technical review of the TEM will be presented. A general overview of the FIB will also be given. It is a useful technology to prepare samples for TEM and a useful tool for many nanofabrication techniques.
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