School of Engineering Department of Electronic and Computer Engineering 147 Nano/microfabrication Technologies for Microelectronic in Summer Supervisor: YANG, Yansong / ECE Student: CHEN, Hongyu / ELEC Course: UROP1000, Summer This report introduced Hongyu CHEN, which I learned and gained in Professor Yansong YANG's group in the summer semester of 2023. There are three parts to this report: 1. 2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD) 2. Equipment training in the NFF lab 3. Paper reading about piezoelectric micromachined ultrasonic transducers (PMUTs) Nano/microfabrication Technologies for Microelectronic in Summer Supervisor: YANG, Yansong / ECE Student: JANG, Jae Won / SENG Course: UROP1000, Summer Microelectronic technologies have emerged to be the driving force of the third and fourth industrial revolutions, making the advancement of nano/microfabrication methods and technologies crucial for greatly expanding and developing our technological landscape. This undergraduate research project has provided me with a valuable opportunity to learn and explore various fabrication techniques and technologies employed in manufacturing microelectronics. I was additionally given the opportunity to explore and learn about the fabrication facility and environment and about various equipment through the Nanofabrication Facility (NFF) orientation training. In this report, I will be providing an overview of the techniques and technologies involved in the fabrication of microelectronics and what I have learned through this project. Nano/microfabrication Technologies for Microelectronic in Summer Supervisor: YANG, Yansong / ECE Student: MIU, Victor / CPEG Course: UROP1000, Summer With the increasing demand for miniaturized electronic devices, microfabrication technology for microelectronics has become more essential in numerous advanced industries. It is the underlying driving force for technology's rapid growth in modern society. As a new participant in the Undergraduate Research Opportunity Program (UROP), my current focus lies in training for basic microfabrication technology knowledge and getting access permission to enter the Nano Fabrication Facility (NFF). This training phase not only equips me with valuable research experience but also prepares me for future studies in this special field. In this report, I will describe what training I have passed and what I have learned during my summer semester in the UROP program.
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