School of Engineering Department of Electronic and Computer Engineering 177 Nano/Microfabrication Technologies for Microelectronic Supervisor: YANG Yansong / ECE Student: YAN Zhichen / CPEG Course: UROP 4100, Fall This report includes two main parts: the COMSOL Multiphysics simulation I conducted for the Piezoelectric Micromachined Ultrasonic Transducer (PMUT) design, and the use of L-Edit to create the mask layout for the photolithography process. In designing a PMUT, several critical parameters are taken into consideration, including the cavity diameter and the thickness of the piezoelectric layer. These parameters significantly influence the performance and efficiency of the transducer. Additionally, various mask configurations have been developed to evaluate the effects of different PMUT diameters, the spacing between PMUTs, and the performance of ring PMUTs within an array. Each configuration is tested to understand its impact on the overall performance of the PMUT array, ensuring optimal design and functionality for future applications. Piezoelectric Micromachined Ultrasonic Transducers for Sensing and Imaging Supervisor: YANG Yansong / ECE Student: REN Junru / ELEC Course: UROP 1100, Fall UROP 2100, Spring In order to improve structural analysis, this report extends an advanced simulation of piezoelectric boundary acoustic waves in a suspended LiNbO₃ model. The study uses COMSOL Multiphysics to characterize the admittance response over a wide frequency spectrum. Iterative refinement scans are used to identify resonance peak frequencies with high accuracy. The revised framework briefly tests curved LiNbO₃ geometries to evaluate shape-dependent admittance behaviors, in addition to the original analysis of electrode material impacts and parametric variations. The results, which include comprehensive parameter configurations, admittance-frequency plots, and comparative analyses, provide important information for improving the designs of piezoelectric acoustic wave devices, especially when it comes to using curved and suspended architectures to customize mechanical stability and frequency responses. Piezoelectric Micromachined Ultrasonic Transducers for Sensing and Imaging Supervisor: YANG Yansong / ECE Student: XIAO Yanjing / COSC Course: UROP 1100, Spring This study investigates the influence of different conductor materials (copper, aluminum, silver, and nickel) on the inductance value of single-turn planar coils through simulation experiments and theoretical analysis. Using a standard coil structure, we conducted simulations with Ansys HFSS to analyze the effects of material conductivity, quality factor, and resistance characteristics under varying thicknesses and frequencies. Based on simulation results, copper shows excellent performance as a material for high-frequency inductors. Silver is also a potential suitable material option without cost constraints. Additionally, this study involved observation of the calibration kit using the Keyence VK-X260K 3D Laser Confocal Microscope. These findings provide experimental evidence to guide material selection for high-frequency inductors.
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